Fabrication of atomic-scale dopant-in-silicon quantum processors

Neil J. Curson Professor at University College London and CEO of Asentas Quantum Systems San Francisco Bay Area IEEE Nanotechnology Council 2020, 2017 & 2014 Nanotechnology Council Outstanding Chapter (world-wide) 2019, 2016 & 2014 IEEE Outstanding Chapter (Western USA) 2019, 2016 IEEE Outstanding Chapter (Santa Clara Valley) http://sites.ieee.org/sfbanano Fabrication of atomic-scale dopant-in-silicon devices for silicon quantum processors Neil J. Curson Professor at University College London and CEO of Asentas Quantum Systems In-Person Meeting Thursday, November 12, 2026 11:30 AM: Networking, Pizza & Drinks Noon -- 1 pm: Seminar -------- Please register on Eventbrite before 9:30 AM on Thursday, November 12, 2026 Walk-In attendance is welcomed but discouraged (cash or check; no credit cards) Please assist us in our event planning! If you decide not to attend... - please cancel reservations by 8:00 AM on Thursday, ** Tickets cancelled by 8 AM on November 12, 2026 will have payments refunded*** Note: Eventbrite Fees will not be refunded Day of Event Sign In & Registration Information: Please be prepared to present a Photo ID when entering EAG and signing in for the seminar. (Driver's license, or another government issued identification). Registration information now also includes attendee Citizenship . Location: EAG Laboratories 810 Kifer Road, Sunnyvale ==> Use corner entrance: Kifer Road / San Lucar Court ==> Do not enter at main entrance on Kifer Road (Parking: on street or in parking lot behind EAG) Fabrication of atomic-scale dopant-in-silicon devices for silicon quantum processors Abstract: Atomic-scale devices made from individual dopant atoms in silicon offer new ways to investigate physical phenomena and develop novel technologies. At Asentas Quantum Systems (AQS), we are developing a solid-state quantum processor architecture in which the valence electron of a single dopant atom serves as a spin qubit and the nuclear spin of the same atom is used as a quantum memory. I will introduce this architecture and describe the fabrication technology that underpins it. Our approach uses scanning tunneling microscopy hydrogen resist lithography (STM-HRL) to place individual dopant atoms deterministically with atomic-scale precision. Although STM-HRL is an established technique, the limited yield of single-atom fabrication has until recently been a major barrier scaling to large numbers of devices. I will show how we have overcome this limitation, achieving a single-atom yield approaching 100% for arsenic in silicon, providing a fabrication pathway to qubit scaling [1,2]. I will outline the full device fabrication process and present preliminary electrical measurements from arsenic-in-silicon devices fabricated using hydrogen resist lithography. Finally, I will set out AQS’s vision for building a fault-tolerant quantum computer. Read More: Single-Atom Control of Arsenic Incorporation in Silicon for High-Yield Artificial Lattice Fabrication Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy Speaker Bio: Neil Curson Professor of Nanoelectronics and Nanofabrication at University College London (UCL) and CEO of Asentas Quantum Systems (AQS) Neil Curson is a leading expert in atomic-scale device fabrication. He has published more than 100 journal articles and has worked in experimental quantum computing since the infancy of the field, joining the Centre for Quantum Computing Technology in Australia in 2000. His research interests center on understanding and controlling the behavior of atoms and molecules at surfaces and on developing and deploying new scanning probe lithography techniques, to fabricate of nanoscale electronic devices and atomic-scale components for quantum information processing. Other areas of research include the microscopy, spectroscopy, and optical characterization of single dopants and dopant nanostructures in Group IV semiconductors and the study of spatial and temporal sources of decoherence in semiconductors and oxides. He and two co-founders formed AQS in 2026, with the goal of using atomic-scale device fabrication to build a fault-tolerant quantum processor. Neil Curson received his PhD from the University of Cambridge, UK. ------- If you have questions or problems with your registration, please contact [email protected] * Please help us manage our event planning. When we have many walk-in attendees, it is difficult for us to order the proper amount of food for lunch. ** Tickets cancelled by 8 AM on November 12, will have payments refunded*** Note: Eventbrite Fees will not be refunded When it comes to understanding the physical structure, chemical properties and performance of advanced materials and integrated circuitry, no other scientific services company offers the breadth of experience, diversity of analytical techniques or technical ingenuity of EAG Laboratories. We deliver multi-disciplinary, problem-solving expertise to help our customers accelerate innovation, ensure quality and safety, and protect intellectual property.